An 84 Pixel All-Silicon Corrugated Feedhorn for CMB Measurements

Silicon platelet corrugated feedhorn arrays for cosmic microwave background (CMB) measurements at millimeter wavelengths (130 GHz to 170 GHz) have been developed for deployment for the polarization-sensitive upgrade to both the Atacama Cosmology Telescope (ACTpol) and the South Pole Telescope (SPTpol). We present fabrication developments and the first results of a prototype monolithic feedhorn array consisting of 84 horns. Measurements at room temperature show good beam quality across the needed bandwidth, return loss of <−20 dB, an insertion loss of <−0.4 dB, and cross polarization of <−23 dB. The 32 platelets were aligned to a 1σ variation of 8 μm.