Sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes

In this paper, a first-order sliding mode controller is implemented to control the tilt angle of a 2-Degree-of-freedom (DOF) torsional MEMS micromirror with sidewall electrodes. Stability of the closed-loop system is proved by Lyapunov method. Furthermore, both the experimental and simulation results are shown to verify the effectiveness of the control scheme. It is demonstrated that the torsional MEMS micromirror with proposed sliding mode controller has good transient response and tracking performance.

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