论文信息 - High resolution determination of local residual stress gradients in single- and multilayer thin film systems - 字舞流文

High resolution determination of local residual stress gradients in single- and multilayer thin film systems

H. Gänser | J. Michler | R. Brunner | B. Sartory | D. Kiener | J. Zechner | X. Maeder | R. Treml | D. Kozic | R. Schöngrundner