论文信息 - Complete Si-photonics device-library on 300mm wafers

Complete Si-photonics device-library on 300mm wafers

We report performances of active and passive devices in a Silicon-Photonic library on a 300mm-CMOS-platform, showing highly uniform behavior of passive WDM devices, Mach-Zehnder modulators and germanium photo-detectors with state of the art performances.

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