Epitaxial growth and transfer of single crystalline Si thin films on double layered porous silicon substrate
暂无分享,去创建一个
[1] P. Chu,et al. Silicon-on-Insulator Structure Fabricated by Electron Beam Evaporation of Si on Porous Si and Epitaxial Layer Transfer , 2001 .
[2] Takao Yonehara,et al. Epitaxial layer transfer by bond and etch back of porous Si , 1994 .
[3] J. Colinge. Silicon-on-Insulator Technology: Materials to VLSI , 1991 .
[4] J. Colinge. Silicon-on-Insulator Technology , 1991 .
[5] D. Zheng,et al. A Low Temperature Silicon‐on‐Insulator Fabrication Process Using Si MBE on Double‐Layer Porous Silicon , 1998 .