Nano-structured lithium-tin plane fabrication for laser produced plasma and extreme ultraviolet generation

This paper deals with a lithium/tin combined target to increase the conversion efficiency of extreme ultraviolet (EUV) of 13.5 nm emission from laser-produced plasma. The bilayer target of glass/lithium (20 nm)/tin (50 nm) exhibits a sharp and strong emission in comparison with a Sn bulk target. The reverse coating of glass/tin/lithium was unstable and EUV could not be observed. By using nano-porous SnO 2 and an electrochemical deposition of lithium, nano-structured lithium/tin composite was prepared, and was stable without deliquescence of lithium.

[1]  Tatsuya Aota,et al.  Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma. , 2005, Physical review letters.

[2]  Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source. , 2007, The Review of scientific instruments.

[3]  Kunioki Mima,et al.  Low-density tin targets for efficient extreme ultraviolet light emission from laser-produced plasmas , 2006 .

[4]  Katsunobu Nishihara,et al.  Conversion efficiency of LPP sources , 2006 .

[5]  Keiji Nagai,et al.  Polymorphic tin dioxide synthesis via sol–gel mineralization of ethyl–cyanoethyl cellulose lyotropic liquid crystals , 2006 .

[6]  Takahiro Inoue,et al.  Extreme ultraviolet source using a forced recombination process in lithium plasma generated by a pulsed laser , 2007 .

[7]  Hiroaki Nishimura,et al.  Preparation of Low-Density Macrocellular Tin Dioxide Foam with Variable Window Size , 2005 .

[8]  B. Rus,et al.  Recent experiments on the hydrodynamics of laser-produced plasmas conducted at the PALS laboratory , 2007 .

[9]  Kunioki Mima,et al.  Opacity effect on extreme ultraviolet radiation from laser-produced tin plasmas. , 2005, Physical review letters.

[10]  Hiroaki Nishimura,et al.  Tin-Polymer Composite on a Rotating Drum as a High Repetition Rate Laser Target for Extreme Ultraviolet Generation , 2006 .

[11]  Hiroshi Azechi,et al.  Foam materials for cryogenic targets of fast ignition realization experiment (FIREX) , 2005 .

[12]  R. R. Paguio,et al.  Silica, Metal Oxide, and Doped Aerogel Development for Target Applications , 2006 .

[13]  Keiji Nagai,et al.  Electrochemical Fabrication of Low Density Metal Foam with Mono-Dispersed-Sized Micro- and Submicro-Meter Pore , 2006 .

[14]  K. Kolacek,et al.  Ways to discharge-based soft X-ray lasers with the wavelength λ<15 nm , 2008 .

[15]  Shinsuke Fujioka,et al.  Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams , 2005 .

[16]  Kunioki Mima,et al.  Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications , 2005 .

[17]  Hiroaki Nishimura,et al.  Monochromatic imaging and angular distribution measurements of extreme ultraviolet light from laser-produced Sn and SnO2 plasmas , 2004 .

[18]  Y. Izawa,et al.  Control of Micro- and Nano-Structure in Ultralow-Density Hydrocarbon Foam , 2004 .

[19]  A. Cummings,et al.  13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources , 2006 .

[20]  Ahmed Hassanein,et al.  Hollow laser self-confined plasma for extreme ultraviolet lithography and other applications , 2007 .

[21]  K. Nishihara,et al.  Development of “Punching-Out Target” to Generate Extreme Ultraviolet (EUV) Light , 2007 .

[22]  M. Nakai,et al.  Thin shell aerogel fabrication for FIREX-I targets using high viscosity (phloroglucinol carboxylic acid)/formaldehyde solution , 2008 .

[23]  Noriaki Miyanaga,et al.  Angular distribution control of extreme ultraviolet radiation from laser-produced plasma by manipulating the nanostructure of low-density SnO2 targets , 2006 .

[24]  Mark S. Tillack,et al.  Spectral control of emissions from tin doped targets for extreme ultraviolet lithography , 2006 .

[25]  P. Ayyub,et al.  Hotter electrons and ions from nano-structured surfaces , 2008 .

[26]  V. Rozanov,et al.  Theoretical and experimental studies of the radiative properties of hot dense matter for optimizing soft X-ray sources , 2007 .

[27]  Yongkun Ding,et al.  Two-photon group radiation transfer study in low-density foam cylinder , 2006 .

[28]  V. N. Kondrashov,et al.  Experience of micro-heterogeneous target fabrication to study energy transport in plasma near critical density , 2006 .

[29]  Yoshinori Shimada,et al.  SnO2 target with controllable microstructure and thickness for generating extreme ultraviolet light , 2006 .