论文信息 - ChemInform Abstract: Interlayer Mediated Epitaxy of Cobalt Silicide on Silicon (100) from Low Temperature Chemical Vapor Deposition of Cobalt. - 字舞流文

ChemInform Abstract: Interlayer Mediated Epitaxy of Cobalt Silicide on Silicon (100) from Low Temperature Chemical Vapor Deposition of Cobalt.

A. Kaloyeros | Guillermo M. Nuesca | G. Peterson | Barry Arkles | J. Sullivan | C. Goldberg | A. Londergan