CMOS-MEMS free-free beam resonators

In this paper a 25 MHz free-free beam flexural resonator monolithically integrated in a 0.35 um CMOS technology is presented. A comparison between the frequency response and electrical characteristics between free-free beam and clamped-clamped beams shows higher qualities factor for free-free beams which will allow better oscillators for frequency references in terms of phase noise.

[1]  J. Lahann,et al.  Fully monolithic CMOS nickel micromechanical resonator oscillator , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

[2]  G. Abadal,et al.  A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- $Q$ 22-MHz Polysilicon Clamped-Clamped Beam Resonators , 2009, IEEE Electron Device Letters.

[3]  Min-Hang Bao.  Chapter 1 – Introduction to micro mechanical transducers , 2000 .

[4]  G. Abadal,et al.  Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies , 2009 .

[5]  G.K. Fedder,et al.  On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[6]  C. Nguyen,et al.  MEMS technology for timing and frequency control , 2005, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005..

[7]  Min-Hang Bao,et al.  Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes , 2000 .

[8]  G. Abadal,et al.  Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range , 2008, IEEE Electron Device Letters.