论文信息 - A Self-Limited Atomic Layer Deposition of WS2 Based on the Chemisorption and Reduction of Bis(t-butylimino)bis(dimethylamino) Complexes - 字舞流文

A Self-Limited Atomic Layer Deposition of WS2 Based on the Chemisorption and Reduction of Bis(t-butylimino)bis(dimethylamino) Complexes

N. Koch | N. Pinna | Xiaomin Xu | P. Amsalem | E. A. Quadrelli | Yen-Chun Chen | M. Raza | S. Wahl | Yanlin Wu | K. S. Lokare | Kai Skrodczky | M. Zhukush | P. Gaval | Medet Zhukush