Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems
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A. Griol | J. Ahopelto | C. Sotomayor‐Torres | D. Navarro‐Urrios | T. Makkonen | A. Pitanti | M. Colombano | G. Arregui | Guilhem Madiot | Alejandro Martínez