Microelectrical mechanical systems in surgery and medicine1
暂无分享,去创建一个
[1] Nadim Maluf,et al. An Introduction to Microelectromechanical Systems Engineering , 2000 .
[2] Richard M. Satava,et al. Cybersurgery: Advanced Technologies for Surgical Practice , 1997 .
[3] P. Hauptmann. Sensors: A Comprehensive Survey , 1996 .
[4] David S. Latchman,et al. Biochemistry (4th edn) , 1995 .
[5] Richard B. Fair,et al. Microelectromechanical systems: a new technology for biomedical applications , 1993, Proceedings of the 15th Annual International Conference of the IEEE Engineering in Medicine and Biology Societ.
[6] William B Scott,et al. MICRO-MACHINES HOLD PROMISE FOR AEROSPACE. , 1993 .
[7] K D Wise,et al. Microfabrication techniques for integrated sensors and microsystems. , 1991, Science.
[8] J. Bryzek,et al. Silicon Sensors And Microstructures , 1991, Electro International, 1991.
[9] K. J. Gabriel,et al. Silicon micromechanics: sensors and actuators on a chip , 1990, IEEE Spectrum.
[10] Stephen F. Bart,et al. A study of three microfabricated variable-capacitance motors , 1990 .
[11] S. D. Collins,et al. Study of electrochemical etch-stop for high-precision thickness control of silicon membranes , 1989 .
[12] Yu-Chong Tai,et al. IC-processed electrostatic micro-motors , 1988, Technical Digest., International Electron Devices Meeting.
[13] R. Howe. Surface micromachining for microsensors and microactuators , 1988 .
[14] Yu-Chong Tai,et al. Integrated movable micromechanical structures for sensors and actuators , 1988 .
[15] M. Mehregany,et al. Integrated fabrication of polysilicon mechanisms , 1988 .
[16] Donnie K. Reinhard,et al. Introduction to integrated circuit engineering , 1987 .
[17] S. Sze. Semiconductor Devices: Physics and Technology , 1985 .
[18] K.E. Petersen,et al. Silicon as a mechanical material , 1982, Proceedings of the IEEE.
[19] K. D. Wise,et al. An electrochemical P-N junction etch-stop for the formation of silicon microstructures , 1981, IEEE Electron Device Letters.
[20] Roy A. Colclaser,et al. Microelectronics: Processing and device design , 1980 .
[21] M. Sumi,et al. Data compaction method for raster–scan exposure system , 1979 .
[22] K. Bean,et al. Anisotropic etching of silicon , 1978, IEEE Transactions on Electron Devices.
[23] Harry N. Norton,et al. Handbook of transducers for electronic measuring systems , 1969 .
[24] L. Brixner. Segregation Coefficients of the Rare Earth Niobates in CaMoO4 , 1967 .