X‐ray microfabrication activities at the Center for Advanced Microstructures and Devices (CAMD) (invited)

The x‐ray lithography and micromachining facility at CAMD is described. It consists of four dedicated beamlines and exposure stations using the synchrotron radiation delivered by the CAMD storage ring and 230 m2 of fully equipped clean room. The scientific and engineering activities exemplified by results of current studies are reported.

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