Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching.

Large-scale high quality microlens arrays (MLAs) play an important role in enhancing the imaging quality of CCD and CMOS as well as the light extraction efficiency of LEDs and OLEDs. To meet the requirement in MLAs' wide application areas, a rapid fabrication method to fabricate large-scale MLAs with high quality, high fill factor and high uniformity is needed, especially on the glass substrate. In this paper, we present a simple and cost-efficient approach to the development of both concave and convex large-scale microlens arrays (MLAs) by using femtosecond laser wet etching method and replication technique. A large-scale high quality square-shaped microlens array with 512 × 512 units was fabricated.The unit size is 20 × 20 μm² on the whole scale of 1 × 1 cm². Its perfect uniformity and optical performance are demonstrated.

[1]  Edoardo Charbon,et al.  Measurement and modeling of microlenses fabricated on single-photon avalanche diode arrays for fill factor recovery. , 2014, Optics express.

[2]  Qing Yang,et al.  Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser. , 2013, ACS applied materials & interfaces.

[3]  Shinill Kang,et al.  Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy , 2012 .

[4]  Qing Yang,et al.  Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica. , 2012, Optics letters.

[5]  G. Su,et al.  Self-Assembled Microlens on Top of Light-Emitting Diodes Using Hydrophilic Effect for Improving Extraction Efficiency and Increasing Viewing Angle , 2012, Journal of Display Technology.

[6]  Antony Orth,et al.  Microscopy with microlens arrays: high throughput, high resolution and light-field imaging. , 2012, Optics express.

[7]  Xun Hou,et al.  A simple route to fabricate artificial compound eye structures. , 2012, Optics express.

[8]  K. Leo,et al.  Highly efficient white top-emitting organic light-emitting diodes comprising laminated microlens films. , 2012, Nano letters.

[9]  C. Arnold,et al.  Chalcogenide glass microlenses by inkjet printing , 2011, Applied optics.

[10]  Qing Yang,et al.  Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method. , 2010, Optics express.

[11]  Hong-Bo Sun,et al.  High numerical aperture microlens arrays of close packing , 2010 .

[12]  Minghui Hong,et al.  Laser precision engineering: from microfabrication to nanoprocessing , 2010 .

[13]  Qing Yang,et al.  Photoetching of spherical microlenses on glasses using a femtosecond laser , 2009, Optics Communications.

[14]  C. Hsu,et al.  Fabrication of microlens array diffuser films with controllable haze distribution by combination of breath figures and replica molding methods. , 2008, Optics express.

[15]  Mohammed Ashraf,et al.  Geometrical characterization techniques for microlens made by thermal reflow of photoresist cylinder , 2008 .

[16]  T.C. Chong,et al.  Laser precision engineering from microfabrication to nanoprocessing , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[17]  Ronald A. Arif,et al.  Enhancement of light extraction efficiency of InGaN quantum wells light emitting diodes using Si O 2 /polystyrene microlens arrays , 2007 .

[18]  Jui-Wen Pan,et al.  Homogenized LED-illumination using microlens arrays for a pocket-sized projector. , 2007, Optics express.

[19]  A. Kumar,et al.  Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning , 2006 .

[20]  Jun-Bo Yoon,et al.  Microlens array diffuser for a light-emitting diode backlight system. , 2006, Optics letters.

[21]  Steven A. Soper,et al.  Out-of-plane microlens array fabricated using ultraviolet lithography , 2005 .

[22]  Hugo Thienpont,et al.  Direct writing of microlenses in polycarbonate with excimer laser ablation. , 2003, Applied optics.

[23]  Luke P. Lee,et al.  Tunable liquid-filled microlens array integrated with microfluidic network. , 2003, Optics express.

[24]  N. S. Ong,et al.  Microlens array produced using hot embossing process , 2002 .

[25]  J. Nishii,et al.  Femtosecond laser-assisted three-dimensional microfabrication in silica. , 2001, Optics letters.

[26]  Young-Se Kwon,et al.  Microlens for efficient coupling between LED and optical fiber , 1999 .