Design of a prototype of a 3-axis capacitive acceleration sensor

The paper describes a prototype of a 3-axis surface-micromachined capacitive microaccelerometer, which is supposed to measure low-g turbogenerator vibrations. The sensor is based on three separate, one-axis sensors with individual proof masses rather than on a single proof mass. The paper also provides estimation of sensor parameters, based on simulation results and analytical calculations.

[1]  Andrzej Napieralski,et al.  Application of CAD tools for design and simulation of capacitive microaccelerometers , 2003, The Experience of Designing and Application of CAD Systems in Microelectronics, 2003. CADSM 2003. Proceedings of the 7th International Conference..

[2]  Chong-Won Lee,et al.  Capacitive type surface-micromachined silicon accelerometer with stiffness tuning capability , 1999 .