论文信息 - Contactless Testing for Chip Verification

Contactless Testing for Chip Verification

A brief description is given on the state of the art of three contactless testing techniques: Electron-beam testing, laser-beam testing and emission microscopy. First, reasons are given why contactless testing is still important for chip verification and failure analysis. Second, a scenario of contactless testing describes the influences of chip, package and CAD/CAT environment. Finally requirements for contactless testing as well as design for e-beam testability are discussed.

E. Wolfgang | S. Gorlich | J. Kolzer

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