Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection

A new silicon resonant angular rate sensor is presented. The sensor consists of a packaged glass-silicon-glass structure and is made by a batch-fabrication process. The sensor is a tuning fork with both sides suspended by torsion bars. Electromagnetic excitation and capacitive detection are used. The applied angular rate generates the Coriolis' force and the resonator starts torsional vibration around the torsion bars. The test device shows a sensitivity of 0.7 fF sec/deg. In this paper, the working principles, fabrication process, and simulated and measured outputs of the sensor are described. The scaling rule of the angular rate sensor are also considered.