A New Design of 3-DOF Flexure-mechanism Positioner with Electromagnetic Technology

In this paper, we present the design, control and implementation of a novel, compact and three degree-of-freedom (DOF) precise flexure-mechanism electromagnetic-actuating positioning system with submicrometer-scale precise positioning capability and millimeter-level large travel range. The design of the positioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the eddy-current sensors to achieve the 3-DOF motion. The positioner presented herein shows the planar travel range of 1mmtimes1mm with a position resolution of plusmn300 nm. To let the compact system be more robust and stable in positioning, we propose an adaptive sliding-mode controller. We will demonstrate the satisfactory performance of the positioning system, including stiffness and precision, with theoretical analysis and experimental results

[1]  David L. Trumper,et al.  Modeling and vector control of a planar magnetic levitator , 1997, IAS '97. Conference Record of the 1997 IEEE Industry Applications Conference Thirty-Second IAS Annual Meeting.

[2]  Gary H. Koopmann,et al.  Design, modeling, and performance of a high-force piezoelectric inchworm motor , 1998, Smart Structures.

[3]  Won-jong Kim,et al.  Six-axis nano-positioning with planar magnetic levitation , 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516).

[4]  David L. Trumper,et al.  Linear Motor-Leviated Stage for Photolithography , 1997 .

[5]  Chia-Hsiang Menq,et al.  Large travel ultra precision x-y-/spl theta/ motion control of a magnetic-suspension stage , 2003 .

[6]  S H Chang,et al.  An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis. , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[7]  M. Maggiore,et al.  Implementation and model verification of a magnetic levitation system , 2005, Proceedings of the 2005, American Control Conference, 2005..

[8]  Dae-Gab Gweon,et al.  Piezo-driven metrological multiaxis nanopositioner , 2001 .

[9]  K. Pister,et al.  A planar air levitated electrostatic actuator system , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[10]  Anuradha M. Annaswamy,et al.  Robust Adaptive Control , 1984, 1984 American Control Conference.

[11]  Jie Gu,et al.  Six-axis nanopositioning device with precision magnetic levitation technology , 2004, IEEE/ASME Transactions on Mechatronics.

[12]  R.B. Mrad,et al.  A systematic procedure for the design of piezoelectric inchworm precision positioners , 2004, IEEE/ASME Transactions on Mechatronics.

[13]  Chia-Hsiang Menq,et al.  Precision motion control of a magnetic suspension actuator using a robust nonlinear compensation scheme , 1997 .