Low-temperature deposition of thermochromic VO2 thin films on glass substrates

Abstract Highly dense and highly crystalline vanadium dioxide (VO 2 ) thermochromic thin films were successfully sputter-deposited on glass substrates at a low substrate temperature of 300 °C. By superimposition of RF and DC magnetron sputtering, we were able to fabricate VO 2 films with high solar transition efficiency (△T sol ) of 12.8% at a substrate temperature of 300 °C, which was comparable to the results attained at 450 °C by conventional DC sputtering. The VO 2 crystallization at a lower temperature of 300 °C could be achieved using a high-energy and high-density plasma induced by RF-superimposed DC sputtering. The hysteresis curves of transmittance as a function of temperature revealed that the VO 2 films by RF-superimposed DC sputtered at 300 °C exhibited a reduced transition temperature of 59 °C and a narrow hysteresis width of 3 °C. The enhanced transition properties might result from the compressive stress in the b and c axes as well as the densification of the films due to ion bombardment effect.

[1]  C. Labrugère,et al.  Rapid hydrothermal synthesis of VO2 (B) and its conversion to thermochromic VO2 (M1). , 2013, Inorganic chemistry.

[2]  Y. Jeong,et al.  Properties of ITO Films Deposited on Plastic Substrate by RF Superimposed DC Magnetron Sputtering Method , 2007 .

[3]  Ludvik Martinu,et al.  Thermochromic VO2 thin films deposited by HiPIMS , 2014 .

[4]  Claes-Göran Granqvist,et al.  Thermochromic vanadium oxide thin films: Electronic and optical properties , 2014 .

[5]  Ho-Chul Lee.  The behaviors of the carrier concentrations and mobilities in indium–tin-oxide thin films by DC and RF-superimposed DC reactive magnetron sputtering at the various process temperatures , 2006 .

[6]  Chan Park,et al.  Thermochromic properties of VO2 thin film on SiNx buffered glass substrate , 2013 .

[7]  H. Miyazaki,et al.  Substrate bias effect on the fabrication of thermochromic VO2 films by reactive RF sputtering , 2006 .

[8]  Ivan P. Parkin,et al.  Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide , 2004 .

[9]  Yuji Muraoka,et al.  Metal-insulator transition of VO2 thin films grown on TiO2 (001) and (110) substrates , 2002 .

[10]  P. Song,et al.  Electrical and structural properties of In-doped ZnO films deposited by RF superimposed DC magnetron sputtering system , 2010 .

[11]  Yanfeng Gao,et al.  VO2 Films by Polymer-Assisted Deposition: Investigation of Thermal Decomposition of Precursor Gel and Control of Phase Transition Temperatures , 2011 .

[12]  S. Yun,et al.  Vanadium Dioxide Films Deposited on Amorphous SiO2- and Al2O3-Coated Si Substrates by Reactive RF-Magnetron Sputter Deposition , 2008 .

[13]  M. Bender,et al.  Deposition of transparent and conducting indium-tin-oxide films by the r.f.-superimposed DC sputtering technology , 1999 .

[14]  C. L. Ferreira,et al.  Vanadium oxide thin films produced by magnetron sputtering from a V2O5 target at room temperature , 2013 .

[15]  Y. Shigesato,et al.  Thermochromic VO2 Films Deposited by RF Magnetron Sputtering Using V2O3 or V2O5 Targets , 2000 .

[16]  J. Ndjaka,et al.  High substrate temperature induced anomalous phase transition temperature shift in sputtered VO2 thin films , 2010 .

[17]  Chan Park,et al.  Effect of lattice misfit on the transition temperature of VO2 thin film , 2012, Journal of Materials Science.

[18]  Bin Liu,et al.  Comprehensive study of the metal-insulator transition in pulsed laser deposited epitaxial VO2 thin films , 2013 .

[19]  Manfred Ruske,et al.  RF-superimposed DC and pulsed DC sputtering for deposition of transparent conductive oxides , 2007 .

[20]  R. Wendt,et al.  Thermal power at a substrate during ZnO:Al thin film deposition in a planar magnetron sputtering system , 1997 .

[21]  W. Schreiner,et al.  Highly Oriented VO2 Thin Films Prepared by Electrodeposition , 2011 .

[22]  H. Wada,et al.  AFM observation for the oxygen deficiency effect on the surface morphology of VO2 thin films , 1997 .

[23]  Ping Jin,et al.  Formation and Thermochromism of VO2 Films Deposited by RF Magnetron Sputtering at Low Substrate Temperature , 1994 .

[24]  Yasushi Suzuki,et al.  Epitaxial Growth of V2O3 Thin Films on c-Plane Al2O3 in Reactive Sputtering and Its Transformation to VO2 Films by Post Annealing , 2011 .

[25]  J. Sakai,et al.  Stress-induced VO2 films with M2 monoclinic phase stable at room temperature grown by inductively coupled plasma-assisted reactive sputtering , 2012 .

[26]  Wanxia Huang,et al.  Thermal stability of VO2 thin films deposited by sol–gel method , 2015, Journal of Sol-Gel Science and Technology.

[27]  R. Cebulla,et al.  Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: Relationships between plasma parameters and structural and electrical film properties , 1998 .

[28]  M. Kawasaki,et al.  Collective bulk carrier delocalization driven by electrostatic surface charge accumulation , 2012, Nature.

[29]  Saad Mekhilef,et al.  Performance, materials and coating technologies of thermochromic thin films on smart windows , 2013 .

[30]  R. Cebulla,et al.  Transparent and conducting ZnO(:Al) films deposited by simultaneous RF- and DC-excitation of a magnetron , 1998 .

[31]  Jinhua Li,et al.  Temperature sensitivity of resistance of VO2 polycrystalline films formed by modified ion beam enhanced deposition , 2004 .

[32]  Guoqiang Tan,et al.  VO2-based double-layered films for smart windows: Optical design, all-solution preparation and improved properties , 2011 .

[33]  Evgheni Strelcov,et al.  Gas sensor based on metal-insulator transition in VO2 nanowire thermistor. , 2009, Nano letters.

[34]  Russell Binions,et al.  Solid State Thermochromic Materials , 2010 .

[35]  Xiao Hu,et al.  VO2/hydrogel hybrid nanothermochromic material with ultra-high solar modulation and luminous transmission , 2015 .

[36]  Zongtao Zhang,et al.  Nanoceramic VO2 thermochromic smart glass: A review on progress in solution processing , 2012 .

[37]  Nobuto Oka,et al.  Effects of Energetic Ion Bombardment on Structural and Electrical Properties of Al-Doped ZnO Films Deposited by RF-Superimposed DC Magnetron Sputtering , 2010 .

[38]  Gunnar A. Niklasson,et al.  Progress in chromogenics: New results for electrochromic and thermochromic materials and devices , 2009 .

[39]  Yong Wook,et al.  Analysis of the surface morphology and the resistance of VO2 thin films on M-plane Al2O3 , 2007 .

[40]  Aibing Yu,et al.  Recent progress in VO2 smart coatings: Strategies to improve the thermochromic properties , 2016 .