论文信息 - Improving the STEM Spatial Resolution Limit

Improving the STEM Spatial Resolution Limit

Scanning transmission electron microscopy (STEM) has progressed very significantly in recent years. Improving the spatial resolution by aberration correction has led to 1Å (100 pm) spatial resolution becoming routine at primary energies as low as 60 keV in cold field emission (CFEG) STEM [1-3], and probe currents of ~1 nA have become available in sub-2Å probes at higher keVs. Another important development was the introduction of ultra-high energy resolution monochromators and spectrometers, which have made 5 meV energy resolution electron energy loss spectroscopy (EELS) possible [4].

[1] J. Biskupek,et al. Chromatic Aberration Correction for Atomic Resolution TEM Imaging from 20 to 80 kV. , 2016, Physical review letters.

[2] H. Sawada,et al. Atomic-Resolution STEM Imaging of Graphene at Low Voltage of 30 kV with Resolution Enhancement by Using Large Convergence Angle. , 2015, Physical review letters.

[3] P. Batson,et al. Vibrational spectroscopy in the electron microscope , 2014, Nature.

[4] S. Pennycook,et al. Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy , 2010, Nature.

[5] O. Krivanek,et al. An electron microscope for the aberration-corrected era. , 2008, Ultramicroscopy.

[6] P D Nellist,et al. Direct Sub-Angstrom Imaging of a Crystal Lattice , 2004, Science.

[7] O. L. Krivanek,et al. Sub-ångstrom resolution using aberration corrected electron optics , 2002, Nature.