Research on Laser Trimming of Silicon MEMS Vibratory Gyroscopes
暂无分享,去创建一个
Bin Zhou | Rong Zhang | Bin Zhou | Rong Zhang | Zhiyong Chen | Xiaoguang Zhao | Zhiyong Chen | Xiaoguang Zhao
[1] R. Kullmer,et al. Laser-induced chemical etching of silicon in chlorine atmosphere , 1987, Other Conferences.
[2] Jun Yang,et al. Mechanism Analysis and System Identification of the Quadrature Error in MEMS Gyroscope , 2007 .
[3] Laser-induced chemical etching of silicon in chlorine atmosphere , 1987 .
[4] C. Nguyen,et al. Location-dependent frequency tuning of vibrating micromechanical resonators via laser trimming , 2004, Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004..
[5] Michel Meunier,et al. Novel laser trimming technique for microelectronics , 2001, SPIE LASE.
[6] J. Heitz,et al. Etching of crystalline Si in Cl2 atmosphere by means of an optical fiber tip , 2001 .
[7] Three-dimensional nanostructures by direct laser etching of Si , 1995 .
[8] A. Kourepenis,et al. Error sources in in-plane silicon tuning-fork MEMS gyroscopes , 2006, Journal of Microelectromechanical Systems.
[9] D. Bäuerle. Laser Processing and Chemistry , 1996 .
[10] Andrei M. Shkel,et al. MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf) , 2008 .