论文信息 - Annealing and Impurity Effects in Co Thin Films for MOL Contact and BEOL Metallization - 字舞流文

Annealing and Impurity Effects in Co Thin Films for MOL Contact and BEOL Metallization

B. Haran | B. Peethala | J. Demarest | M. Raymond | M. Hopstaken | J. Kelly | V. Kamineni | H. Shobha | X. Lin | A. Pacquette | Y. Liang | H. Amanapu | L. Jiang | J. Kelly