Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators
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[1] J. M. Noworolski,et al. Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures , 1996 .
[2] M. Hoffmann,et al. Bulk silicon micromachining for MEMS in optical communication systems , 2002 .
[3] Ming C. Wu,et al. Micromachining for optical and optoelectronic systems , 1997, Proc. IEEE.
[4] Freddie Shing-Hong Lin,et al. An electromagnetic MEMS 2/spl times/2 fiber optic bypass switch , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[5] Don L. DeVoe,et al. Large-force electrothermal linear micromotors , 2004 .
[6] J. Lang,et al. A curved-beam bistable mechanism , 2004, Journal of Microelectromechanical Systems.
[7] Lih Y. Lin,et al. Opportunities and challenges for MEMS in lightwave communications , 2002 .
[8] N. D. Rooij,et al. Micro-opto-mechanical 2/spl times/2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation , 1999 .
[9] Yogesh B. Gianchandani,et al. Long throw and rotary output electro-thermal actuators based on bent-beam suspensions , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).
[10] Don L. DeVoe,et al. High-power optical microswitch fabricated by deep reactive ion etching (DRIE) , 2003, SPIE MOEMS-MEMS.
[11] J. Lang,et al. A high-current electrothermal bistable MEMS relay , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
[12] J. Qiu,et al. A centrally-clamped parallel-beam bistable MEMS mechanism , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
[13] D. L. DeVoe. Thermal issues in MEMS and microscale systems , 2002 .