论文信息 - Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film - 字舞流文

Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film

M. Perego | M. De Michielis | F. Pérez-Murano | M. Laus | M. Fernández-Regúlez | G. Seguini | C. Bonafos | J. Llobet | R. Chiarcos | G. Tallarida | Stefano Kuschlan