Nanoporous organosilicate films as antireflection coatings
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Koushik Biswas | Shubhra Gangopadhyay | Ho-Cheol Kim | S. Gangopadhyay | Robert D. Miller | K. Biswas | Ho-Cheol Kim
[1] U. Steiner,et al. Nanophase-separated polymer films as high-performance antireflection coatings , 1999, Science.
[2] Cortney R. Kreller,et al. Fabrication of Multilayered Nanoporous Poly(methyl silsesquioxane) , 2002 .
[3] Tetsuo Tsutsui,et al. Progress in Electroluminescent Devices Using Molecular Thin Films , 1997 .
[4] Max Born,et al. Principles of optics - electromagnetic theory of propagation, interference and diffraction of light (7. ed.) , 1999 .
[5] A. Saiani,et al. Materials Research Society Symposium Proceedings , 2007 .
[6] Karen Maex,et al. Low dielectric constant materials for microelectronics , 2003 .
[7] W. Lowdermilk,et al. Gel-derived single layer antireflection films , 1982 .
[8] C. Horwitz,et al. A new vacuum‐etched high‐transmittance (antireflection) film , 1980 .
[9] J. D. Luttmer,et al. Nanoporous Silica as an Ultralow-k Dielectric , 1997 .
[10] Tayyab I. Suratwala,et al. Sol—gel derived coatings on glass , 1997 .
[11] J. Hedrick,et al. Supramolecular Approaches to Nanoscale Dielectric Foams for Advanced Microelectronic Devices , 2000 .
[12] H. Hattori,et al. Anti‐Reflection Surface with Particle Coating Deposited by Electrostatic Attraction , 2001 .
[13] C. Brinker,et al. Template-Based Approaches to the Preparation of Amorphous, Nanoporous Silicas , 1996 .
[14] D. Y. Yoon,et al. Phase-Separated Inorganic-Organic Hybrids for Microelectronic Applications , 1997 .