RF MEMS RECONFIGURABLE FILTERS BASED ON MOVABLE SIDEWALLS OF A 3D MICROMACHINED TRANSMISSION LINE

This paper presents MEMS tuneable filters, where the reconfiguration of the filter is achieved by moving the sidewalls of a 3D micromachined transmission line. The sidewalls of the transmission line are moved by MEMS electrostatic actuators completely integrated into the ground layers of a thick-film coplanar waveguide.