Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma
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K. Koga | M. Shiratani | N. Itagaki | K. Kamataki | T. Okumura | J. Lai | Naoto Yamashita | M. Otaka | Toshiaki Arima | Kizuki Ikeda