论文信息 - P1J-2 Electromechanical Coupling Coefficient k15 and Crystallites Alignment of (1120) Textured ZnO Films

P1J-2 Electromechanical Coupling Coefficient k15 and Crystallites Alignment of (1120) Textured ZnO Films

Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionally aligned ((112macr0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112macr0) textured ZnO films

Y. Watanabe | M. Matsukawa | T. Yanagitani | M. Kiuchi

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