Improving yield learning by rapid electrical fault inspection and localization

From wafer sort to yield learning is a long, complex process. Even worst because when scan chains fail, wafer sort adds negligible value. To address this gap a fast, reliable and accurate localization technology for scan chain fails that enable rapid translation of these into yield learning is presented.

[1]  William Lo,et al.  Advanced scan chain failure analysis using laser modulation mapping and continuous wave probing , 2012, 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits.