Electromagnetic Simulation Modeling of CMOS Chip in Millimeter-Wave Band

Millimeter-wave CMOS circuits have been developed by many researchers. The use of electromagnetic simulator is inevitable for efficient and low-cost design of circuits. However, in millimeter-wave band with RF CMOS technology, simulation is very difficult due to complicated structure of the CMOS chip and inaccurate material property and so on. A CMOS chip includes dummy metal fills, metal layers, vias surface of silicon substrate, and so on which is difficult to simulate directly. Electromagnetic modeling techniques for the problem will be reviewed and presented.