Self-consistent discharge characteristics of collisional helicon plasmas

The steady-state fluid equations and Maxwell’s equations are solved self-consistently in helicon plasmas. When the Trivelpiece-Gould mode dominates the power transfer, the density profile is relatively flat in the central region compared to the case where there is significant bulk heating by the helicon wave. It is shown that the density changes from a relatively flat to steep profile at a certain value of the magnetic field, and this is related to the mode coupling and decoupling of the helicon and Trivelpiece-Gould modes.

[1]  Suwon Cho,et al.  The effects of the density profile on the power absorption and the equilibrium density in helicon plasmas , 1997 .

[2]  Michael A. Lieberman,et al.  Local and global particle and power balance in large area capacitive discharges , 2003 .

[3]  D. Blackwell,et al.  Upper Limit to Landau Damping in Helicon Discharges , 1999 .

[4]  Valery Godyak,et al.  Soviet radio frequency discharge research , 1986 .

[5]  Konstantin P. Shamrai,et al.  Excitation, conversion and damping of waves in a helicon plasma source driven by an m = 0 antenna , 1997 .

[6]  Suwon Cho,et al.  The field and power absorption profiles in helicon plasma resonators , 1996 .

[7]  D. Graves,et al.  Comparison between a two-dimensional simulation and a global conservation model for a compact ECR plasma source , 1995 .

[8]  J. Margot,et al.  The radial structure of a magnetically confined surface‐wave plasma column , 1996 .

[9]  M. Krämer,et al.  Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling , 2000 .

[10]  Suwon Cho.  The role of the lower hybrid resonance in helicon plasmas , 2000 .

[11]  Donald Arnush,et al.  Generalized theory of helicon waves. II. Excitation and absorption , 1998 .

[12]  J. Kwak,et al.  Upper limit to the monotonic increasing dependence of the plasma density on the magnetic field in helicon discharges , 2000 .

[13]  S. Brown,et al.  Fundamentals of plasma physics , 1977 .

[14]  R. Boswell,et al.  Plasma production using a standing helicon wave , 1970 .

[15]  Suwon Cho.  A self-consistent global model of neutral gas depletion in pulsed helicon plasmas , 1999 .

[16]  D. Arnush,et al.  Evidence for Trivelpiece-Gould modes in a helicon discharge. , 2002, Physical review letters.

[17]  K. P. Shamrai,et al.  Resonances and anti-resonances of a plasma column in a helicon plasma source☆ , 1995 .