Ferroelectric sensors

The growing class of ferroelectric sensors covers a broad spectrum of devices based on piezoelectric, electrostrictive, pyroelectric, dielectric, and conduction phenomena. It finds applications in as diverse and wide areas as industrial production, automotive and aerospace applications, communications, health care, and environmental monitoring. In this brief review, we first introduce the physical phenomena underlying the major types of ferroelectric sensors and the materials used. Then, the principal types sensors are described: infrared sensors, pressure sensors, force and motion sensors, flow sensors, hydrophones, ultrasonic transducers for medical imaging and material testing, and a variety of devices based on the exponential temperature dependence of resistivity. Emphasis is placed on recent advances and emerging technologies, such as thin-film array devices and novel single crystal sensors.

[1]  A. J. Moulson,et al.  Electroceramics: Materials, Properties, Applications , 1990 .

[2]  S. Saitoh,et al.  A 20 MHz single-element ultrasonic probe using 0.91Pb(Zn/sub 1/3/Nb/sub 2/3/)O/sub 3/-0.09PbTiO/sub 3/ single crystal , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[3]  Paul W. Kruse,et al.  A comparison of the limits to the performance of thermal and photon detector imaging arrays , 1995 .

[4]  Richard M. White,et al.  DIRECT PIEZOELECTRIC COUPLING TO SURFACE ELASTIC WAVES , 1965 .

[5]  W. Blake,et al.  The radiation from free-free beams in air and in water , 1974 .

[6]  S. Saitoh,et al.  A 20 MHz single-element ultrasonic probe using 0.91Pb(Zn(1/3 )Nb(2/3))O(3)-0.09PbTiO(3) single crystal. , 1998, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[7]  A. Tagantsev,et al.  Uniaxial stress dependence of the permittivity of electroceramics , 1999 .

[8]  N. Setter,et al.  New high performance-low cost monolithic bimorph piezoelectric actuators for applications requiring large displacements with significant forces , 2000, ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076).

[9]  S. D. Collins,et al.  Ultrasonic flexural Lamb-wave actuators based on PZT thin film , 1998 .

[10]  Masanori Okuyama,et al.  Room-temperature-operated infrared image CCD sensor using pyroelectric gate coupled by dielectric connector , 1991 .

[11]  T. Shrout,et al.  Characteristics of relaxor-based piezoelectric single crystals for ultrasonic transducers , 1997, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Peter Ryser,et al.  Pyroelectric thin-film sensor array , 1997 .

[13]  Yoshihiro Tomita,et al.  Epitaxial growth and the crystallographic, dielectric, and pyroelectric properties of lanthanum-modified lead titanate thin films , 1986 .

[14]  Howard R. Beratan,et al.  Producibility advances in hybrid uncooled infrared detectors , 1994, Defense, Security, and Sensing.

[15]  Howard R. Beratan,et al.  Advances in monolithic ferroelectric uncooled IRFPA technology , 1998, Defense, Security, and Sensing.

[16]  S. Saitoh,et al.  Forty-channel phased array ultrasonic probe using 0.91Pb(Zn/sub 1/3/Nb/sub 2/3/)O/sub 3/-0.09PbTiO/sub 3/ single crystal , 1999, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[17]  Rao Yunhua,et al.  Characterization of (Pb, La)TiO3 thin films prepared by sol—gel processing , 1995 .

[18]  Tatsuo Nakayama,et al.  Pyroelectric linear array infrared sensors made of La-modified PbTiO3 thin films and their applications , 1995, Optics & Photonics.

[19]  A. Fukumoto The application of piezoelectric ceramics in diagnostic ultrasound transducers , 1982 .

[20]  E. Benes,et al.  Sensors based on piezoelectric resonators , 1995 .

[21]  M. Schreiter,et al.  Optimized PZT Thin Films for Pyroelectric IR Detector Arrays , 1999 .

[22]  W. A. Smith,et al.  The role of piezocomposites in ultrasonic transducers , 1989, Proceedings., IEEE Ultrasonics Symposium,.

[23]  S. Büttgenbach,et al.  Triple-beam resonant silicon force sensor based on piezoelectric thin films , 1994 .

[24]  M. Sayer,et al.  High frequency ultrasonics using PZT sol gel composites , 1999 .

[25]  Richard M. White,et al.  Generation and detection of ultrasonic Lamb waves in a thin deposited film by using interdigital transducers , 1983 .

[26]  Electra Gizeli,et al.  Design considerations for the acoustic waveguide biosensor , 1997 .

[27]  M. Takasaki,et al.  A surface acoustic wave gyro sensor , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[28]  Günter Kovacs,et al.  Theoretical comparison of sensitivities of acoustic shear wave modes for (bio)chemical sensing in liquids , 1992 .

[29]  Thomas R. Shrout,et al.  Characteristics of relaxor-based piezoelectric single crystals for ultrasonic transducers , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

[30]  Paul Antony Manning,et al.  Uncooled IR imaging: hybrid and integrated bolometer arrays , 1996, Defense, Security, and Sensing.

[31]  Miko Elwenspoek,et al.  Q-factor and Frequency Shift of Resonating Silicon Diaphragms in Air , 1990 .

[32]  Roger W. Whatmore,et al.  Pyroelectric devices and materials , 1986 .

[33]  S. Saitoh,et al.  A 3.7 MHz phased array probe using 0.91Pb(Zn(1/3)Nb(2/3))O(3)-0.09PbTiO(3 ). , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[34]  Yoshihiro Tomita,et al.  Preparation of c‐axis oriented PbTiO3 thin films and their crystallographic, dielectric, and pyroelectric properties , 1986 .

[35]  Kohji Toda,et al.  Lamb‐wave delay lines with interdigital electrodes , 1973 .

[36]  R. Watton,et al.  Induced pyroelectricity in sputtered lead scandium tantalate films and their merit for IR detector arrays , 1991 .

[37]  Siegfried Bauer,et al.  Pyroelectric polymer electrets , 1996 .

[38]  Christopher Verplaetse,et al.  Inertial Proprioceptive Devices: Self-Motion-Sensing Toys and Tools , 1996, IBM Syst. J..

[39]  James S. Speck,et al.  Domain configurations due to multiple misfit relaxation mechanisms in epitaxial ferroelectric thin films. III. Interfacial defects and domain misorientations , 1995 .

[40]  B. Willing,et al.  Gas spectrometry based on pyroelectric thin film arrays integrated on silicon , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[41]  Yuhuan Xu,et al.  Ferroelectric Materials and Their Applications , 2023, Japanese Journal of Applied Physics.

[42]  Toshiro Higuchi,et al.  An ultrasonic motor using bending cylindrical transducer based on PZT thin film , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[43]  K.K. Li,et al.  Micromachined high frequency ferroelectric sonar transducers , 1997, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[44]  J. Herbert,et al.  Ferroelectric transducers and sensors , 1982 .

[45]  A. M. Glass,et al.  Principles and Applications of Ferroelectrics and Related Materials , 1977 .

[46]  S. Porter A brief guide to pyroelectric detectors , 1981 .

[48]  Don Berlincourt,et al.  3 – Piezoelectric and Piezomagnetic Materials and Their Function in Transducers , 1964 .

[49]  Clive A. Randall,et al.  Processing and structure-property relationships for fine grained PZT ceramics , 1996, ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics.

[50]  Paul Muralt,et al.  Ferroelectric thin films for micro-sensors and actuators: a review , 2000 .

[51]  S. D. Collins,et al.  Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids , 1997 .

[52]  S. D. Collins,et al.  Flexural-plate-wave actuators based on PZT thin film , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[53]  Jan H. J. Fluitman,et al.  Piezoelectrically Driven Silicon Beam Force Sensor , 1991 .

[54]  M. Weihnacht,et al.  Sensors based on shear-horizontal surface acoustic waves in layered quartz/SiO/sub 2/ and LiTaO/sub 3//SiO/sub 2/ structures , 1999, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027).

[55]  Dragan Damjanovic,et al.  FERROELECTRIC, DIELECTRIC AND PIEZOELECTRIC PROPERTIES OF FERROELECTRIC THIN FILMS AND CERAMICS , 1998 .

[56]  Paul Muralt,et al.  Thin film pyroelectric array as a detector for an infrared gas spectrometer , 1998 .

[57]  Ramamoorthy Ramesh,et al.  Thin Film Ferroelectric Materials and Devices , 1997 .

[58]  L. E. Cross,et al.  Connectivity and piezoelectric-pyroelectric composites , 1978 .

[59]  Paul Muralt,et al.  Pb(Zr,Ti)O3 thin films on zirconium membranes for micromechanical applications , 1996 .

[60]  P. Muralt,et al.  PZT thin films for microsensors and actuators: Where do we stand? , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[61]  R. Barnes Noninvasive Evaluation of Peripheral Arterial Disease , 1978, Angiology.

[62]  L. E. Cross,et al.  Piezoelectric Composite Materials for Ultrasonic Transducer Applications. Part I: Resonant Modes of Vibration of PZT Rod-Polymer Composites , 1985, IEEE Transactions on Sonics and Ultrasonics.

[63]  James S. Speck,et al.  Domain configurations due to multiple misfit relaxation mechanisms in epitaxial ferroelectric thin films. II. Experimental verification and implications , 1994 .

[64]  E. Staples Electronic nose simulation of olfactory response containing 500 orthogonal sensors in 10 seconds , 1999, 1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027).

[65]  James S. Speck,et al.  DOMAIN CONFIGURATIONS DUE TO MULTIPLE MISFIT RELAXATION MECHANISMS IN EPITAXIAL FERROELECTRIC THIN FILMS. I: THEORY , 1994 .

[66]  N. D. Rooij,et al.  Very high Q-factor resonators in monocrystalline silicon , 1990 .

[67]  L. E. Cross,et al.  Piezoelectric Composite Materials for Ultrasonic Transducer Applications. Part II: Evaluation of Ultrasonic Medical Applications , 1985, IEEE Transactions on Sonics and Ultrasonics.

[68]  High frequency properties of new fine-grained modified lead titanate ceramics [transducers] , 1997, 1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118).

[69]  J. Nye Physical Properties of Crystals: Their Representation by Tensors and Matrices , 1957 .