Calculation and analysis based on Sigmund's theory for sputtering yield

Sputtering yield is an important parameter characterizing the sputtering effect, to which the Sigmund’s linear collision cascade theory is widely applied in calculation. Describes briefly the Sigmund’s theory and analyzes various empirical formulas based on the theory. Then, the sputtering yields under different conditions are calculated to discuss what fields those empirical formulas are available to use.