Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications
暂无分享,去创建一个
[1] N. F. de Rooij,et al. Piezoelectric position sensor for ultrasonic EFM motors , 1994 .
[2] Paul Muralt,et al. Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions , 1996 .
[3] W. Ehrfeld,et al. Application of the LIGA technique for the development of microactuators based on electromagnetic principles , 1992 .
[4] G.-A. Racine,et al. Speed control of elastic force motors by means of integrated piezoelectric sensors , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.
[5] Minoru Kurosawa,et al. Ultrasonic Motor Utilizing Elastic Fin Rotor , 1991 .
[6] Paul Muralt,et al. Fabrication and characterization of PZT thin-film vibrators for micromotors , 1995 .
[7] L. E. Cross,et al. Piezoelectric micromotors for microrobots , 1990, IEEE Symposium on Ultrasonics.
[8] N. F. de Rooij,et al. Electrodeposited Electrostatic Rigid-Rotor Wobble Motors on Silicon , 1994 .
[9] S. M. Vogel,et al. Natural Frequencies of Transversely Vibrating Uniform Annular Plates , 1965 .
[10] G.-A. Racine,et al. Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.
[11] P. Vettiger,et al. Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[12] G.-A. Racine,et al. Hybrid ultrasonic micromachined motors , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.
[13] Fabrication and characterization of PZT thin films for micromotors , 1995 .
[14] R. Muller,et al. IC-processed electrostatic micromotors , 1989 .
[15] S. Ueha,et al. Simulation and experimental study on elastic fin ultrasonic motor , 1992, IEEE 1992 Ultrasonics Symposium Proceedings.
[16] N. F. de Rooij,et al. Piezoelectric cantilever beams actuated by PZT sol-gel thin film , 1996 .
[17] L. E. Cross,et al. Ferroelectric thin film ultrasonic micromotors , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.
[18] P Minotti,et al. Modélisation théorique des moteurs piézoélectriques rotatifs à ondes progressives , 1994 .
[19] David B. Bogy,et al. Effect of the Rotor/Stator Interface Condition Including Contact Type, Geometry, and Material on the Performance of Ultrasonic Motor , 1994 .
[20] N. Setter,et al. Hybrid ultrasonic elastic force motors micromachined in silicon , 1995 .