Photo-patternable, large-area solid-state liquid metal film coated via solution shearing for soft electronics

Liquid metal (LM) is considered one of the most promising conducting materials for soft electronics due to its unique combination of metal-level high conductivity with exceptional deformability and stretchability. However, their practical applicability has thus far been limited due to the challenges of generating chemically and mechanically stable film over a large-area and the need for non-standard fabrication approaches. Here, we report materials and manufacturing methods that enable multiscale patterning (from microns to centimeters) and multilayer integration of ‘solid-state liquid metal (SSLM)’ with the conventional cleanroom process. In this work, solution shearing of a polyelectrolyte-attached LM particle ink is used to generate SSLM films. The stabilized LM particles were observed to form a close-packed thin-film without particle rupture when coated under evaporative regime. This is essential in enabling a subsequent photolithographic lift-off process at wafer-scale to produce high-resolution features (~ 10 µm) of varying thicknesses irrespective of the substrate. Demonstrations of wearable multilayer tactile sensing systems and stretchable skin-interfaced electronics validate the simplicity, versatility, and reliability of this manufacturing strategy, suggesting broad utility in the development of advanced soft electronics.

[1]  Dylan S. Shah,et al.  Highly stretchable multilayer electronic circuits using biphasic gallium-indium , 2021, Nature Materials.

[2]  Y. Chai,et al.  Permeable superelastic liquid-metal fibre mat enables biocompatible and monolithic stretchable electronics , 2021, Nature Materials.

[3]  Steve Park,et al.  From Diagnosis to Treatment: Recent Advances in Patient-Friendly Biosensors and Implantable Devices. , 2021, ACS nano.

[4]  Jae-Woong Jeong,et al.  Soft subdermal implant capable of wireless battery charging and programmable controls for applications in optogenetics , 2021, Nature Communications.

[5]  L. Beccai,et al.  Hydrogen-doped viscoplastic liquid metal microparticles for stretchable printed metal lines , 2021, Nature Materials.

[6]  Xingyu Jiang,et al.  Highly Stretchable and Biocompatible Liquid Metal-Elastomer Conductors for Self-Healing Electronics. , 2020, Small.

[7]  S. Bergbreiter,et al.  Controlled Assembly of Liquid Metal Inclusions as a General Approach for Multifunctional Composites , 2020, Advanced materials.

[8]  Min Koo,et al.  Autonomous Surface Reconciliation of a Liquid‐Metal Conductor Micropatterned on a Deformable Hydrogel , 2020, Advanced materials.

[9]  Guangtao Chang,et al.  A versatile approach for preparing stable and high concentration liquid metal nanoparticles on a large scale , 2020 .

[10]  C. Majidi,et al.  Surface Engineering of Liquid Metal Nanodroplets by Attachable Diblock Copolymers. , 2020, ACS nano.

[11]  Ankit,et al.  Directed Assembly of Liquid Metal–Elastomer Conductors for Stretchable and Self‐Healing Electronics , 2020, Advanced materials.

[12]  M. Kaltenbrunner,et al.  Resilient yet entirely degradable gelatin-based biogels for soft robots and electronics , 2020, Nature Materials.

[13]  A. Leber,et al.  Soft and stretchable liquid metal transmission lines as distributed probes of multimodal deformations , 2020, Nature Electronics.

[14]  John A Rogers,et al.  Materials for flexible bioelectronic systems as chronic neural interfaces , 2020, Nature Materials.

[15]  M. Dickey,et al.  Attributes, Fabrication, and Applications of Gallium‐Based Liquid Metal Particles , 2020, Advanced science.

[16]  O. Brand,et al.  Nanofabrication for all-soft and high-density electronic devices based on liquid metal , 2020, Nature Communications.

[17]  Jong-Gwan Yook,et al.  Parallel Signal Processing of a Wireless Pressure‐Sensing Platform Combined with Machine‐Learning‐Based Cognition, Inspired by the Human Somatosensory System , 2019, Advanced materials.

[18]  J. Y. Sim,et al.  Mechanically transformative electronics, sensors, and implantable devices , 2019, Science Advances.

[19]  Takao Someya,et al.  Materials and structural designs of stretchable conductors. , 2019, Chemical Society reviews.

[20]  C. Majidi,et al.  Solution processable liquid metal nanodroplets by surface-initiated atom transfer radical polymerization , 2019, Nature Nanotechnology.

[21]  J. Y. Sim,et al.  Microstructured Porous Pyramid-Based Ultrahigh Sensitive Pressure Sensor Insensitive to Strain and Temperature. , 2019, ACS applied materials & interfaces.

[22]  Jiuyang Zhang,et al.  Ultrauniform Embedded Liquid Metal in Sulfur Polymers for Recyclable, Conductive, and Self‐Healable Materials , 2019, Advanced Functional Materials.

[23]  Jayoung Kim,et al.  Wearable biosensors for healthcare monitoring , 2019, Nature Biotechnology.

[24]  Zhenan Bao,et al.  Soft and elastic hydrogel-based microelectronics for localized low-voltage neuromodulation , 2019, Nature Biomedical Engineering.

[25]  Thanh Son Le,et al.  Adsorption of poly(styrenesulfonate) onto different-sized alumina particles: characteristics and mechanisms , 2018, Colloid and Polymer Science.

[26]  Francisco Molina-Lopez,et al.  An integrated self-healable electronic skin system fabricated via dynamic reconstruction of a nanostructured conducting network , 2018, Nature Nanotechnology.

[27]  Ji Woong Yu,et al.  Highly conductive, stretchable and biocompatible Ag–Au core–sheath nanowire composite for wearable and implantable bioelectronics , 2018, Nature Nanotechnology.

[28]  Xiaochen Wu,et al.  Liquid Metal Droplets Wrapped with Polysaccharide Microgel as Biocompatible Aqueous Ink for Flexible Conductive Devices , 2018, Advanced Functional Materials.

[29]  K. Khoshmanesh,et al.  Liquid metals: fundamentals and applications in chemistry. , 2018, Chemical Society reviews.

[30]  Carmel Majidi,et al.  An autonomously electrically self-healing liquid metal–elastomer composite for robust soft-matter robotics and electronics , 2018, Nature Materials.

[31]  Boris Murmann,et al.  Skin electronics from scalable fabrication of an intrinsically stretchable transistor array , 2018, Nature.

[32]  Zhenan Bao,et al.  The meniscus-guided deposition of semiconducting polymers , 2018, Nature Communications.

[33]  Pingping Wang,et al.  Liquid metal fiber composed of a tubular channel as a high-performance strain sensor , 2017 .

[34]  Jung Woo Lee,et al.  Self-assembled three dimensional network designs for soft electronics , 2017, Nature Communications.

[35]  Zhenan Bao,et al.  Pursuing prosthetic electronic skin. , 2016, Nature materials.

[36]  G. Filippone,et al.  Effects of nanoparticles on the morphology of immiscible polymer blends – Challenges and opportunities , 2016 .

[37]  S. Ko,et al.  Highly Stretchable and Transparent Metal Nanowire Heater for Wearable Electronics Applications , 2015, Advanced materials.

[38]  Ja Hoon Koo,et al.  Large‐Area Assembly of Densely Aligned Single‐Walled Carbon Nanotubes Using Solution Shearing and Their Application to Field‐Effect Transistors , 2015, Advanced materials.

[39]  M. Thuo,et al.  Synthesis of liquid core-shell particles and solid patchy multicomponent particles by shearing liquids into complex particles (SLICE). , 2014, Langmuir : the ACS journal of surfaces and colloids.

[40]  Xian Huang,et al.  High‐Performance Biodegradable/Transient Electronics on Biodegradable Polymers , 2014, Advanced materials.

[41]  James J. S. Norton,et al.  Materials and Optimized Designs for Human‐Machine Interfaces Via Epidermal Electronics , 2013, Advanced materials.

[42]  Qin Zhang,et al.  Atomized spraying of liquid metal droplets on desired substrate surfaces as a generalized way for ubiquitous printed electronics , 2013, 1311.2158.

[43]  Zhenan Bao,et al.  Solution coating of large-area organic semiconductor thin films with aligned single-crystalline domains. , 2013, Nature materials.

[44]  Yonggang Huang,et al.  Materials and Mechanics for Stretchable Electronics , 2010, Science.

[45]  R. Podgornik.  Polyelectrolyte-Mediated Bridging Interactions , 2004 .

[46]  Luckham,et al.  Effect of Particle Size Distribution on the Rheology of Dispersed Systems. , 1999, Journal of colloid and interface science.