Micro-optics metrology using advanced interferometry

Interferometric testing of micro-optical components involves some challenges due to problems such as Fresnel diffraction artefacts, the non-common path interferometer configuration, coherent noise as well disturbing interferences, and uncertainties in distance measurements. Recently we have developed a versatile Mach-Zehnder / Twyman-Green hybride interferometer for micro-optics testing. The system combines the advantages of both interferometer types and allows full characterization of lens and surface figure errors as well as radius of curvature and focal length measurements. The interferometer system is explained and measurement results of micro-lenses are presented. Furthermore, this paper is concerned with the metrology challenges of interferometric testing on microscopic scales.

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