论文信息 - Extended defects in silicon by MeV B++ implantation in different 8" Cz-Si wafers - 字舞流文

Extended defects in silicon by MeV B++ implantation in different 8" Cz-Si wafers

M. Stutzmann | J. Brunner | L. Rubin | D. Huber | Y. Erokhin | R. Pech | K. Funk | W. Morris