Nanophotonics Sensor Based on Microcantilever for Chemical Analysis

A Si-based cantilever sensor with photonic crystal (PC) resonator as readout for chemical sensing and analysis has been developed. The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever deflection measurements in liquid. Through numerical simulation, we demonstrate that the detection capability of this micromechanical sensor operated in water is better than that of sensor operated in air. The minimum detectable Z-displacement and strain of Si/SiO2 cantilever sensor are derived as 0.6 mum and 0.0098% in water and 0.812 mum and 0.0144% in air, respectively. This novel micromechanical sensor shows its promising future in applications such as detection of proteins and DNA in solution.

[1]  C. Quate,et al.  Atomic resolution with an atomic force microscope using piezoresistive detection , 1993 .

[2]  V. Dravid,et al.  MOSFET-Embedded Microcantilevers for Measuring Deflection in Biomolecular Sensors , 2006, Science.

[3]  S. Buttgenbach,et al.  Poly(Dimethylsiloxane) Waveguide Cantilevers for Optomechanical Sensing , 2009, IEEE Photonics Technology Letters.

[4]  Chengkuo Lee,et al.  Optical nanomechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator. , 2009, Applied optics.

[5]  Chengkuo Lee,et al.  Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy , 1997 .

[6]  K. Zinoviev,et al.  A novel optical waveguide microcantilever sensor for the detection of nanomechanical forces , 2006, Journal of Lightwave Technology.

[7]  T. Itoh,et al.  Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities , 1999 .

[8]  Chengkuo Lee,et al.  Deflection detection and feedback actuation using a self‐excited piezoelectric Pb(Zr,Ti)O3 microcantilever for dynamic scanning force microscopy , 1996 .

[9]  Chengkuo Lee,et al.  Design and Modeling of a Nanomechanical Sensor Using Silicon Photonic Crystals , 2008, Journal of Lightwave Technology.

[10]  Henri Benisty,et al.  Recent Advances Toward Optical Devices in Semiconductor-Based Photonic Crystals , 2006, Proceedings of the IEEE.

[11]  David Erickson,et al.  Nanobiosensors: optofluidic, electrical and mechanical approaches to biomolecular detection at the nanoscale , 2008, Microfluidics and nanofluidics.

[12]  Christelle Monat,et al.  Integrated optofluidics: A new river of light , 2007 .

[13]  T. Itoh,et al.  Micromachined piezoelectric force sensors based on PZT thin films , 1996, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[14]  Chengkuo Lee,et al.  Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid , 1997 .

[15]  M. Sepaniak,et al.  Cantilever transducers as a platform for chemical and biological sensors , 2004 .

[16]  N. Amer,et al.  Novel optical approach to atomic force microscopy , 1988 .

[17]  Guo-Qiang Lo,et al.  Si nanophotonics based cantilever sensor , 2008 .