Deep subwavelength photolithography based on surface plasmon polariton resonance with metallic grating waveguide heterostructure
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Changtao Wang | Liang Fang | Xiangang Luo | Beibei Zeng | Changtao Wang | Xuefeng Yang | Beibei Zeng | Q. Feng | Xuefeng Yang | Qin Feng | Xiangang Luo | L. Fang
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