The effect of surface roughness on fringe visibility in optical interferometry

Abstract A review of theoretical results expressing the fringe visibility as a function of the r.m.s. surface roughness of the test piece for several types of interferometer is presented. Michelson, Fresnel mirror, shearing, holographic, and dual wavelength holographic interferometers are considered. The results for each of these arrangements are compared in terms of a common variable, that is the effective wavelength or contour separation. Results compare well in most cases considered. The preliminary calibration of the visibility of contour fringes observed in a dual index holographic interferometer with respect to the surface roughness of the object is also described. This experiment demonstrates that, following a more extensive calibration, surface roughness over a very wide range can be measured using the latter technique. The authors' main interest in these techniques is related to the simultaneous measurement of wear and surface roughness. A demonstration example of this type of measurement is also shown.

[1]  P. Chandley,et al.  Surface roughness measurements from coherent light scattering , 1976 .

[2]  J. Bennett,et al.  Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometer. , 1976, Applied optics.

[3]  J. Halling The specification of surface qualityߝquo vadis , 1972 .

[4]  J. Motyčka Proposed interferometric method of measurement of roughness and autocorrelation function in smooth-finished surfaces. , 1969, Applied optics.

[5]  W. Ribbens Interferometric surface roughness measurement. , 1969, Applied optics.

[6]  N. O. Myers,et al.  Characterization of surface roughness , 1962 .

[7]  W B Ribbens,et al.  Surface roughness measurement by two wavelength holographic interferometry. , 1974, Applied optics.

[8]  P. Chandley Determination of the standard deviation of height on a rough surface using interference microscopy , 1979 .

[9]  W. T. Welford,et al.  Optical estimation of statistics of surface roughness from light scattering measurements , 1977 .

[10]  L. H. Tanner,et al.  A study of the surface parameters of ground and lapped metal surfaces, using specular and diffuse reflection of laser light , 1976 .

[11]  Jumpei Tsujiuchi,et al.  Holographic Generation of Contour Map of Diffusely Reflecting Surface by Using Immersion Method , 1967 .

[12]  M. J. Lalor,et al.  Holographic Interferometry Applied To Minimal Wear Measurement , 1978, Other Conferences.

[13]  C. Munnerlyn,et al.  Rough Surface Interferometry Using a CO(2) Laser Source. , 1968, Applied optics.

[14]  W. Ribbens,et al.  Surface Roughness Measurement by Holographic nterferometry. , 1972, Applied optics.