论文信息 - Electrical and Chemical Properties of the HfO2 / SiO2 / Si Stack: Impact of HfO2 Thickness and Thermal Budget - 字舞流文

Electrical and Chemical Properties of the HfO2 / SiO2 / Si Stack: Impact of HfO2 Thickness and Thermal Budget

S. Lhostis | E. Martinez | C. Licitra | C. Leroux | C. Gaumer | C. Guedj | F. Fillot | M. Charbonnier | N. Benedetto