论文信息 - Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature –Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma–

Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature –Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma–

The improvement of the electrical properties of a lead zirconate titanate (PZT) layer and the reduction of the processing temperature in the aerosol deposition method (ADM) using irradiation of a fast atom beam (FAB) and plasma were investigated. The remanent polarization of the PZT layer deposited with oxygen FAB irradiation on a stainless steel substrate and annealed at 400°C for 10 min was 15 µC/cm2 which is 2 times higher than that without FAB irradiation. The dielectric permittivity (ε) at 1 kHz–1 MHz was also improved by 25–45% by FAB irradiation for PZT layers, both as-deposited at room temperature and annealed at up to 400°C.

J. Akedo | M. Lebedev | S. Baba

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