论文信息 - Finite element method analysis and control of micro actuator with piezoelectric element for spinstand

Finite element method analysis and control of micro actuator with piezoelectric element for spinstand

A micro actuator was introduced to achieve highly precise track following with an head gimbals assembly (HGA) for a spinstand tester. The actuator constructed with a piezoelectric element and a stroke amplifying mechanism was designed by using finite element method analysis. According to robust controller using H∞ control theory was designed so as to guarantee the control performance for two kinds of HGAs. As the experimental results of the step response show, it was found that the settling time and the rise time were about 3.0 ms and about 1.0 ms, respectively.

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