An Efficient Multi-Objective Genetic Algorithm for MEMS Tuning

Micro-electromechanical switches (MEMS) with good performance in high frequency application such as linearity, no DC power consumption, no noise, small size and capability to co-fabrication on the chip today, it is noteworthy. the evolutionary approach in the design optimization of MEMS is a novel and promising research area. The problem is of a multi-objective nature; hence, multi-objective evolutionary algorithms (MOEA) are used. In this paper we introduced geometrical parameters of micro-electromechanical switch as input parameters or variables of multi-objective genetic algorithms then we compute electrical parameter of mems switch That show good performance and relation between theoretical parameter and simulated results is good.

[1]  Yilong Hao,et al.  Silicon-based MEMS process and standardization , 2004, Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004..

[2]  Takaaki Isoda,et al.  Separation of Cells using a Fluidic MEMS Device and a Quantitative Analysis of Cell Movement , 2006 .

[3]  Ashutosh Tiwari,et al.  A Novel Approach to Multi-level Evolutionary Design Optimization of a MEMS Device , 2010, ICES.

[4]  H. Fujita.  Two decades of MEMS -- from surprise to enterprise - , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[5]  Khon Kaen.  MEMS and Microsystems , 2005 .

[6]  G.K. Fedder,et al.  Structured design of integrated MEMS , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[7]  S. Senturia.  Microsystem Design , 2000 .

[8]  H. Morgan,et al.  Solid state AC electroosmosis micro pump on a Chip , 2006, 2006 International Conference on Nanoscience and Nanotechnology.

[9]  Tamal Mukherjee,et al.  Automated optimal synthesis of microresonators , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[10]  Dan Haronian.  Maximizing microelectromechanical sensor and actuator sensitivity by optimizing geometry , 1995 .

[11]  Alice M. Agogino,et al.  A COMPARISON OF MEMS SYNTHESIS TECHNIQUES , 2002 .