论文信息 - Measurement of Mechanical Properties in Small Dimensions by Microbeam Deflection - 字舞流文

Measurement of Mechanical Properties in Small Dimensions by Microbeam Deflection

Oliver Kraft | William D. Nix | R. Schwaiger | W. Nix | O. Kraft | R. Schwaiger

[1] Shefford P. Baker,et al. Thin films: Stresses and mechanical properties VI , 1997 .

[2] L. Schadler,et al. Quantitative measurement of the stress transfer function in nickel/polyimide thin film/copper thin film structures , 1995 .

[3] William D. Nix,et al. Mechanical properties of compositionally modulated Au-Ni thin films: Nanoindentation and microcantilever deflection experiments , 1994 .

[4] P. Flinn,et al. MECHANICAL STRENGTH AND MICROSTRUCTURE OF OXYGEN ION-IMPLANTED AL FILMS , 1994 .

[5] Daniel Josell,et al. A new method for tensile testing of thin films , 1993 .

[6] Ramnath Venkatraman,et al. Separation of film thickness and grain boundary strengthening effects in Al thin films on Si , 1992 .

[7] Jan-Åke Schweitz,et al. mechanical Characterization of Thin Films by Micromechanical Techniques , 1992 .

[8] William D. Nix,et al. Mechanical properties of thin films , 1989 .

[9] Timothy P. Weihs,et al. Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films , 1988 .

[10] P. Flinn,et al. Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history , 1987, IEEE Transactions on Electron Devices.