Real-time phase shift interference microscopy.

A real-time phase shift interference microscopy system is presented using a polarization-based Linnik interferometer operating with three synchronized, phase-masked, parallel detectors. Using this method, several important applications that require high speed and accuracy, such as dynamic focusing control, tilt measurement, submicrometer roughness measurement, and 3D profiling of fine structures, are demonstrated in 50 volumes per second and with 2 nm height repeatability.

[1]  Chiayu Ai,et al.  Simple and effective phase unwrapping technique , 1993, Optics & Photonics.

[2]  Bryan Kok Ann Ngoi,et al.  Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces , 2001 .

[3]  Ibrahim Abdulhalim,et al.  Spatial coherence effect on layer thickness determination in narrowband full-field optical coherence tomography. , 2011, Applied optics.

[4]  J. M. Huntley,et al.  Temporal phase-unwrapping algorithm for automated interferogram analysis. , 1993, Applied optics.

[5]  Chris L. Koliopoulos,et al.  Simultaneous phase-shift interferometer , 1992, Optics & Photonics.

[6]  H A Vrooman,et al.  Image processing algorithms for the analysis of phase-shifted speckle interference patterns. , 1991, Applied optics.

[7]  Gabriel Popescu,et al.  Imaging red blood cell dynamics by quantitative phase microscopy. , 2008, Blood cells, molecules & diseases.

[8]  K A Stetson,et al.  Phase-step interferometry of irregular shapes by using an edge-following algorithm. , 1992, Applied optics.

[9]  J C Wyant,et al.  Testing aspherics using two-wavelength holography. , 1971, Applied optics.

[10]  G S Kino,et al.  Mirau correlation microscope. , 1990, Applied optics.

[11]  Katherine Creath,et al.  Processing and improvements in dynamic quantitative phase microscope , 2013, Photonics West - Biomedical Optics.

[12]  Etienne Cuche,et al.  Microscopy: One-shot analysis , 2009 .

[13]  I. Abdulhalim.  Theory for double beam interference microscopes with coherence effects and verification using the linnik microscope , 2001 .

[14]  M. Takeda,et al.  Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry , 1982 .

[15]  J C Wyant,et al.  Two-wavelength phase shifting interferometry. , 1984, Applied optics.

[16]  Natan T Shaked,et al.  Simultaneous two-wavelength transmission quantitative phase microscopy with a color camera. , 2010, Optics letters.

[17]  C Polhemus,et al.  Two-wavelength interferometry. , 1973, Applied optics.

[18]  Katherine Creath,et al.  Dynamic quantitative phase imaging for biological objects using a pixelated phase mask , 2012, Biomedical optics express.

[19]  Ultrahigh-resolution full-field optical coherence tomography using spatial coherence gating and quasi-monochromatic illumination. , 2012, Optics letters.

[20]  W. Macy,et al.  Two-dimensional fringe-pattern analysis. , 1983, Applied optics.

[21]  R. Smythe,et al.  Instantaneous Phase Measuring Interferometry , 1984 .

[22]  K. Creath.  Step height measurement using two-wavelength phase-shifting interferometry. , 1987, Applied optics.

[23]  Matt Novak,et al.  Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer. , 2005, Applied optics.

[24]  J A Quiroga,et al.  Phase-unwrapping algorithm for noisy phase-map processing. , 1994, Applied optics.