Optical far- and near-field femtosecond laser ablation of Si for nanoscale chemical analysis

[1]  R. Russo,et al.  Laser wavelength effects in ultrafast near-field laser nanostructuring of Si , 2009, Applied Physics Letters.

[2]  C. Grigoropoulos,et al.  Laser ablation-induced spectral plasma characteristics in optical far-and near fields , 2008 .

[3]  C. Grigoropoulos,et al.  Femtosecond laser ablation induced plasma characteristics from submicron craters in thin metal film , 2007 .

[4]  R. Russo,et al.  Background gas effects on the generation of nanopatterns on a pure silicon wafer with multiple femtosecond near field laser ablation , 2007 .

[5]  Ki-Bong Song,et al.  Recent progress of nano-technology with NSOM. , 2007, Micron.

[6]  M. Hong,et al.  Surface nanostructuring by femtosecond laser irradiation through near-field scanning optical microscopy , 2007 .

[7]  J. Gómez‐Herrero,et al.  WSXM: a software for scanning probe microscopy and a tool for nanotechnology. , 2007, The Review of scientific instruments.

[8]  C. Grigoropoulos,et al.  Optical near-field ablation-induced plasma characteristics , 2006 .

[9]  David J. Hwang,et al.  Efficiency of silicon micromachining by femtosecond laser pulses in ambient air , 2006 .

[10]  Tow Chong Chong,et al.  Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser , 2005 .

[11]  Yong‐Ill Lee,et al.  Recent Applications of Laser‐Induced Breakdown Spectrometry: A Review of Material Approaches , 2004 .

[12]  Chunyi Liu,et al.  Laser assisted plasma spectrochemistry: laser ablation , 2004 .

[13]  A. Assion,et al.  Femtosecond laser-induced-breakdown spectrometry for Ca2+ analysis of biological samples with high spatial resolution , 2003 .

[14]  R. Zenobi,et al.  Looking at the nanoscale: scanning near-field optical microscopy , 2003 .

[15]  Xianglei Mao,et al.  Femtosecond laser ablation ICP-MS , 2002 .

[16]  R. Zenobi,et al.  Scanning Near-Field Optical Microscopy and Spectroscopy as a Tool for Chemical Analysis. , 2000, Angewandte Chemie.

[17]  D. Günther,et al.  Laser ablation and arc/spark solid sample introduction into inductively coupled plasma mass spectrometers , 1999 .

[18]  D. Zeisel,et al.  Pulsed laser‐induced desorption and optical imaging on a nanometer scale with scanning near‐field microscopy using chemically etched fiber tips , 1996 .

[19]  Gerard Mourou,et al.  Machining of sub-micron holes using a femtosecond laser at 800 nm , 1995 .

[20]  T. D. Harris,et al.  Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric Scale , 1991, Science.

[21]  S. A. Lyon,et al.  Wavelength dependence of laser‐enhanced oxidation of silicon , 1982 .

[22]  R. Kniseley,et al.  Inductively coupled plasmas , 1974 .

[23]  Steven Frederick Durrant,et al.  Laser ablation inductively coupled plasma mass spectrometry: achievements, problems, prospects , 1999 .

[24]  D. Bäuerle.  Laser Processing and Chemistry , 1996 .

[25]  R. C. Weast.  CRC Handbook of Chemistry and Physics , 1973 .