A catalytic alloy approach for graphene on epitaxial SiC on silicon wafers
暂无分享,去创建一个
F. Iacopi | N. Mishra | Ryan E. Brock | R. Dauskardt | B. Cunning | Dayle Goding | S. Dimitrijev | B. Wood | J. Boeckl
[1] R. S. Wagner,et al. VAPOR‐LIQUID‐SOLID MECHANISM OF SINGLE CRYSTAL GROWTH , 1964 .
[2] Helmut Kanter,et al. Slow-Electron Mean Free Paths in Aluminum, Silver, and Gold , 1970 .
[3] B. Baliga. Silicon Liquid Phase Epitaxy A Review , 1986 .
[4] Michael Lane,et al. Adhesion and debonding of multi-layer thin film structures , 1998 .
[5] R. Dauskardt,et al. Adhesion and reliability of copper interconnects with Ta and TaN barrier layers , 2000 .
[6] H. Bender,et al. Materials aspects, electrical performance, and scalability of Ni silicide towards sub-0.13 μm technologies , 2001 .
[7] G. Kästle,et al. Size effect of the resistivity of thin epitaxial gold films , 2004 .
[8] C. Berger,et al. Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics. , 2004, cond-mat/0410240.
[9] Andre K. Geim,et al. Electric Field Effect in Atomically Thin Carbon Films , 2004, Science.
[10] Size-Dependent Characteristics of Indium-Seeded Si Nanowire Growth , 2008 .
[11] Fu-Rong Chen,et al. Synthesis of graphene on silicon carbide substrates at low temperature , 2009 .
[12] C. Stinespring,et al. Surface chemistry of Ni induced graphite formation on the 6H-SiC (0 0 0 1) surface and its implications for graphene synthesis , 2010 .
[13] J. Penuelas,et al. Epitaxial graphene on cubic SiC(111)Si(111) substrate. , 2010, Applied physics letters.
[14] Kwang S. Kim,et al. Roll-to-roll production of 30-inch graphene films for transparent electrodes. , 2010, Nature nanotechnology.
[15] A. Ouerghi,et al. Structural coherency of epitaxial graphene on 3C–SiC(111) epilayers on Si(111) , 2010 .
[16] A. Iacopi,et al. Growth of 3C―SiC on 150-mm Si(100) substrates by alternating supply epitaxy at 1000 °C , 2011 .
[17] R. Takahashi,et al. Controls over Structural and Electronic Properties of Epitaxial Graphene on Silicon Using Surface Termination of 3C-SiC(111)/Si , 2011 .
[18] H. Handa,et al. Control of epitaxy of graphene by crystallographic orientation of a Si substrate toward device applications , 2011 .
[19] C. Berger,et al. Large area and structured epitaxial graphene produced by confinement controlled sublimation of silicon carbide , 2011, Proceedings of the National Academy of Sciences.
[20] C. Coletti,et al. Large Area Quasi-Free Standing Monolayer Graphene on 3C-SiC(111) , 2011, 1109.6240.
[21] Martin L Dunn,et al. Ultrastrong adhesion of graphene membranes. , 2011, Nature nanotechnology.
[22] A. Ouerghi,et al. Epitaxial graphene on single domain 3C-SiC(100) thin films grown on off-axis Si(100) , 2012 .
[23] F. Iacopi,et al. Orientation-dependent stress relaxation in hetero-epitaxial 3C-SiC films , 2013 .
[24] Mikael Syväjärvi,et al. Growth of large area monolayer graphene on 3C-SiC and a comparison with other SiC polytypes , 2013 .
[25] A. O'Neill,et al. Local solid phase growth of few-layer graphene on silicon carbide from nickel silicide supersaturated with carbon , 2013 .
[26] D. Basko,et al. Raman spectroscopy as a versatile tool for studying the properties of graphene. , 2013, Nature nanotechnology.
[27] Hirokazu Fukidome,et al. Site-Selective Epitaxy of Graphene on Si Wafers , 2013, Proceedings of the IEEE.
[28] U. Starke,et al. Epitaxial graphene on SiC: from carrier density engineering to quasi-free standing graphene by atomic intercalation , 2014 .
[29] F. Iacopi,et al. Graphitized silicon carbide microbeams: wafer-level, self-aligned graphene on silicon wafers , 2014, Nanotechnology.
[30] Process for forming graphene layers on silicon carbide , 2014 .
[31] N. Motta,et al. Evolution of epitaxial graphene layers on 3C SiC/Si (111) as a function of annealing temperature in UHV , 2014 .
[32] N. Motta,et al. Controlling the surface roughness of epitaxial SiC on silicon , 2014 .