论文信息 - Ohmic contacts to p-6H–SiC using focused ion-beam surface-modification and pulsed laser epitaxial TiN deposition - 字舞流文

Ohmic contacts to p-6H–SiC using focused ion-beam surface-modification and pulsed laser epitaxial TiN deposition

T. Venkatesan | R. Vispute | R. Sharma | M. Wood | K. Edinger | J. Orloff | K. Jones | A. Iliadis | S. N. Andronescu | V. Talyansky | S. Andronescu | R. Sharma