论文信息 - Investigation of Orientation Dependence of the Thermal Expansion Coefficient in Silicon MEMS Resonators - 字舞流文

Investigation of Orientation Dependence of the Thermal Expansion Coefficient in Silicon MEMS Resonators

T. Kenny | M. Hopcroft | E. Ng | C. Ahn | G. Vukasin | Woosung Park | G. M. Glaze | Janna Rodriguez | C. Watson | Lizmarie Comenencia Ortiz