论文信息 - Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem

Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem

A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of ±50 μT with a sensitivity of 0.45 mV/μT.

[1] A. Baschirotto,et al. Precise vector-2D magnetic field sensor system for electronic compass , 2004, Proceedings of IEEE Sensors, 2004..

[2] M.R.J. Gibbs,et al. Digital M-H plotter for low-coercivity metallic glasses , 1988 .

[3] Heinrich Grüger,et al. New and future applications of fluxgate sensors , 2003 .

[4] Pavel Ripka,et al. Pulse excitation of micro-fluxgate sensors , 2001 .

[5] T. O'dell. A low frequency (M,B) loop tracer for amorphous ribbons , 1981 .

[6] Shoji Kawahito,et al. An integrated micro fluxgate magnetic sensor , 1996 .

[7] M. J. Caruso,et al. Applications of magnetic sensors for low cost compass systems , 2000, IEEE 2000. Position Location and Navigation Symposium (Cat. No.00CH37062).

[8] Pavel Ripka,et al. Advances in fluxgate sensors , 2003 .